Issued Patents 2025
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400865 | Pulsed capacitively coupled plasma processes | Peter Ventzek, Kensuke Taniguchi, Shinya Morikita | 2025-08-26 |
| 12394629 | Plasma processing methods using low frequency bias pulses | Peter Ventzek, Mitsunori Ohata | 2025-08-19 |
| 12300500 | Etching of polycrystalline semiconductors | Yun Han, Tomoyuki Oishi, Shuhei Ogawa, Ken Kobayashi, Peter Biolsi | 2025-05-13 |
| 12300468 | Method of uniformity control | Shyam Sridhar, Ya-Ming Chen, Peter Ventzek, Mitsunori Ohata | 2025-05-13 |
| 12300477 | Autonomous operation of plasma processing tool | Jun Shinagawa, Toshihiro KITAO, Chungjong Lee, Masaki Kitsunezuka | 2025-05-13 |
| 12288692 | Method of forming a FET structure by selective deposition of film on source/drain contact | Yun Han, Peter Ventzek, Andrew Metz, Hiroaki Niimi | 2025-04-29 |
| 12272520 | Process control enabled VDC sensor for plasma process | Merritt Funk, Peter Ventzek, Barton Lane, Justin Moses, Chelsea DuBose | 2025-04-08 |
| 12230475 | Systems and methods of control for plasma processing | Peter Ventzek, Mitsunori Ohata | 2025-02-18 |
| 12224160 | Topographic selective deposition | Shyam Sridhar, Peter Ventzek | 2025-02-11 |
| 12217935 | Plasma processing methods using multiphase multifrequency bias pulses | Ya-Ming Chen, Shyam Sridhar, Peter Ventzek | 2025-02-04 |
| 12189297 | Methods for extreme ultraviolet (EUV) resist patterning development | Yun Han, Peter L. G. Ventzek | 2025-01-07 |