Issued Patents 2025
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394629 | Plasma processing methods using low frequency bias pulses | Alok Ranjan, Peter Ventzek | 2025-08-19 |
| 12394600 | Balanced RF resonant antenna system | Qiang Wang, Michael Hummel, Peter Ventzek, Shyam Sridhar | 2025-08-19 |
| 12374531 | Plasma processing apparatus | Hwajun JUNG, Yuki Hosaka | 2025-07-29 |
| 12347646 | Plasma processing apparatus | Bongseong KIM, Masahiro Inoue, Ken Kobayashi | 2025-07-01 |
| 12347654 | Plasma processing apparatus | Hwajun JUNG, Masahiro Suzuki, Yuki Hosaka | 2025-07-01 |
| 12334313 | Plasma processing apparatus and plasma processing method | Hwajun JUNG, Yuki Hosaka, Wan Sung Jin | 2025-06-17 |
| 12300468 | Method of uniformity control | Shyam Sridhar, Ya-Ming Chen, Peter Ventzek, Alok Ranjan | 2025-05-13 |
| 12230475 | Systems and methods of control for plasma processing | Alok Ranjan, Peter Ventzek | 2025-02-18 |