Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341009 | Variable hardness amorphous carbon mask | Shihsheng Chang, Andrew Metz, Yun Han, Kai-Hung Yu, Eric Chih-Fang Liu | 2025-06-24 |
| 12300468 | Method of uniformity control | Shyam Sridhar, Peter Ventzek, Mitsunori Ohata, Alok Ranjan | 2025-05-13 |
| 12217935 | Plasma processing methods using multiphase multifrequency bias pulses | Shyam Sridhar, Peter Ventzek, Alok Ranjan | 2025-02-04 |