Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12341009 | Variable hardness amorphous carbon mask | Shihsheng Chang, Andrew Metz, Yun Han, Ya-Ming Chen, Kai-Hung Yu | 2025-06-24 |
| 12265326 | Method for reducing lithography defects and pattern transfer | Angelique Raley, Nihar Mohanty | 2025-04-01 |
| 12237216 | Method for filling recessed features in semiconductor devices with a low-resistivity metal | Kai-Hung Yu, Shihsheng Chang, Ying Trickett, Yun Han, Henan Zhang +5 more | 2025-02-25 |