Issued Patents 2025
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400872 | Sacrificial capping layer for gate protection | Yun Han, David L. O'Meara, Cheryl Alix, Shan Hu, Henan Zhang | 2025-08-26 |
| 12354842 | In-situ focus ring coating | Minjoon Park | 2025-07-08 |
| 12341009 | Variable hardness amorphous carbon mask | Shihsheng Chang, Yun Han, Ya-Ming Chen, Kai-Hung Yu, Eric Chih-Fang Liu | 2025-06-24 |
| 12334356 | Plasma etching tools and systems | Minjoon Park | 2025-06-17 |
| 12288692 | Method of forming a FET structure by selective deposition of film on source/drain contact | Yun Han, Alok Ranjan, Peter Ventzek, Hiroaki Niimi | 2025-04-29 |
| 12266533 | Sacrificial capping layer for contact etch | Yun Han, Peter Biolsi | 2025-04-01 |
| 12266534 | Forming a semiconductor device using a protective layer | Shihsheng Chang | 2025-04-01 |
| 12211911 | Recessed contact structures and methods | Caitlin Philippi, Sophie Thibaut | 2025-01-28 |
| 12191202 | Contact openings in semiconductor devices | Blaze Messer | 2025-01-07 |