Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300477 | Autonomous operation of plasma processing tool | Jun Shinagawa, Chungjong Lee, Masaki Kitsunezuka, Alok Ranjan | 2025-05-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12300477 | Autonomous operation of plasma processing tool | Jun Shinagawa, Chungjong Lee, Masaki Kitsunezuka, Alok Ranjan | 2025-05-13 |