Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12400865 | Pulsed capacitively coupled plasma processes | Peter Ventzek, Alok Ranjan, Kensuke Taniguchi | 2025-08-26 |
| 12347645 | Substrate processing method and substrate processing apparatus | Akira Hidaka, Shu Kino | 2025-07-01 |