Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392032 | Substrate processing apparatus with cleaning of exhaust system | Naofumi Ohashi, Tadashi Takasaki, Shun MATSUI | 2025-08-19 |
| 12255069 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Yukitomo HIROCHI, Takashi Nogami, Norichika Yamagishi | 2025-03-18 |