Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12261066 | Substrate processing apparatus and furnace opening closer | Norihiro YAMASHIMA | 2025-03-25 |
| 12255069 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Yukitomo HIROCHI, Norichika Yamagishi, Yoshihiko YANAGISAWA | 2025-03-18 |