Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255069 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Takashi Nogami, Norichika Yamagishi, Yoshihiko YANAGISAWA | 2025-03-18 |