Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424409 | Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Teruo Yoshino, Tadashi Takasaki | 2025-09-23 |
| 12392032 | Substrate processing apparatus with cleaning of exhaust system | Yoshihiko YANAGISAWA, Tadashi Takasaki, Shun MATSUI | 2025-08-19 |
| 12387949 | Substrate processing apparatus | Teruo Yoshino, Tadashi Takasaki | 2025-08-12 |
| 12327755 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Toshiyuki Kikuchi, Tadashi Takasaki | 2025-06-10 |
| 12327720 | Method of processing substrate, substrate processing apparatus, recording medium, and manufacturing semiconductor device | Toshiyuki Kikuchi | 2025-06-10 |
| 12320778 | Method of processing substrate, substrate processing apparatus, method of manufacturing semiconductor processing apparatus, and recording medium | Teruo Yoshino, Toshiro Koshimaki | 2025-06-03 |
| 12224185 | Method of manufacturing semiconductor device | Hideharu Itatani, Toshiyuki Kikuchi | 2025-02-11 |