Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424409 | Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Naofumi Ohashi, Tadashi Takasaki | 2025-09-23 |
| 12387949 | Substrate processing apparatus | Naofumi Ohashi, Tadashi Takasaki | 2025-08-12 |
| 12320778 | Method of processing substrate, substrate processing apparatus, method of manufacturing semiconductor processing apparatus, and recording medium | Naofumi Ohashi, Toshiro Koshimaki | 2025-06-03 |
| 12195854 | Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Masaki Murobayashi, Koichiro Harada, Tadashi Terasaki, Masanori NAKAYAMA | 2025-01-14 |