Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424409 | Substrate processing apparatus, substrate processing method, method of manufacturing semiconductor device, and non-transitory computer-readable recording medium | Teruo Yoshino, Naofumi Ohashi | 2025-09-23 |
| 12392032 | Substrate processing apparatus with cleaning of exhaust system | Yoshihiko YANAGISAWA, Naofumi Ohashi, Shun MATSUI | 2025-08-19 |
| 12387949 | Substrate processing apparatus | Teruo Yoshino, Naofumi Ohashi | 2025-08-12 |
| 12327755 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Naofumi Ohashi, Toshiyuki Kikuchi | 2025-06-10 |