Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392032 | Substrate processing apparatus with cleaning of exhaust system | Yoshihiko YANAGISAWA, Naofumi Ohashi, Tadashi Takasaki | 2025-08-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392032 | Substrate processing apparatus with cleaning of exhaust system | Yoshihiko YANAGISAWA, Naofumi Ohashi, Tadashi Takasaki | 2025-08-19 |