Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12327720 | Method of processing substrate, substrate processing apparatus, recording medium, and manufacturing semiconductor device | Naofumi Ohashi | 2025-06-10 |
| 12327755 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Naofumi Ohashi, Tadashi Takasaki | 2025-06-10 |
| 12224185 | Method of manufacturing semiconductor device | Hideharu Itatani, Naofumi Ohashi | 2025-02-11 |
| 12198929 | Method of manufacturing semiconductor device, substrate processing apparatus, and non-transitory computer-readable recording medium | Hiroshi Ashihara | 2025-01-14 |