Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374527 | Substrate processing apparatus and method of manufacturing semiconductor device | Katsunori FUNAKI, Yasutoshi TSUBOTA, Koichiro Harada | 2025-07-29 |
| 12249485 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Katsunori FUNAKI, Masaki Murobayashi, Koichiro Harada | 2025-03-11 |
| 12230474 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Tetsuaki INADA, Masaki Murobayashi | 2025-02-18 |
| 12195854 | Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium | Teruo Yoshino, Masaki Murobayashi, Koichiro Harada, Tadashi Terasaki, Masanori NAKAYAMA | 2025-01-14 |