Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424415 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Takayuki Sato | 2025-09-23 |
| 12230474 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Masaki Murobayashi | 2025-02-18 |