Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374527 | Substrate processing apparatus and method of manufacturing semiconductor device | Takeshi Yasui, Yasutoshi TSUBOTA, Koichiro Harada | 2025-07-29 |
| 12249485 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Takeshi Yasui, Masaki Murobayashi, Koichiro Harada | 2025-03-11 |