Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374527 | Substrate processing apparatus and method of manufacturing semiconductor device | Takeshi Yasui, Katsunori FUNAKI, Koichiro Harada | 2025-07-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12374527 | Substrate processing apparatus and method of manufacturing semiconductor device | Takeshi Yasui, Katsunori FUNAKI, Koichiro Harada | 2025-07-29 |