Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359315 | Deposition of oxides and nitrides | Henri Jussila, Chiyu Zhu, Qi Xie, Jiyeon Kim | 2025-07-15 |
| 12354872 | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures | Chiyu Zhu | 2025-07-08 |
| 12320012 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2025-06-03 |
| 12312696 | Thermal atomic layer etching processes | Varun Sharma, Suvi Haukka, Marko Tuominen, Chiyu Zhu | 2025-05-27 |
| 12247288 | Substrate processing apparatus and method | Vaino Kilpi | 2025-03-11 |
| 12241156 | Combination CVD/ALD method, source and pulse profile modification | Hannu Huotari | 2025-03-04 |
| 12237182 | Showerhead device for semiconductor processing system | Varun Sharma | 2025-02-25 |