Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12383923 | Atomic layer deposition with plasma source | Wei Li, Timo Malinen, Juhana Kostamo, Sven Lindfors | 2025-08-12 |
| 12325915 | Substrate processing apparatus and method | Timo Vähä-Ojala, Niklas HOLM, Timo Malinen | 2025-06-10 |
| 12300523 | Substrate processing apparatus and method | — | 2025-05-13 |
| 12247288 | Substrate processing apparatus and method | Tom E. Blomberg | 2025-03-11 |