Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12383923 | Atomic layer deposition with plasma source | Vaino Kilpi, Wei Li, Timo Malinen, Juhana Kostamo | 2025-08-12 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12383923 | Atomic layer deposition with plasma source | Vaino Kilpi, Wei Li, Timo Malinen, Juhana Kostamo | 2025-08-12 |