Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12383923 | Atomic layer deposition with plasma source | Vaino Kilpi, Wei Li, Timo Malinen, Sven Lindfors | 2025-08-12 |
| 12351915 | Porous inlet | Marko PUDAS | 2025-07-08 |
| 12297535 | Substrate processing methods and apparatus | Marko PUDAS, Timo Malinen | 2025-05-13 |