Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12325915 | Substrate processing apparatus and method | Timo Vähä-Ojala, Vaino Kilpi, Timo Malinen | 2025-06-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12325915 | Substrate processing apparatus and method | Timo Vähä-Ojala, Vaino Kilpi, Timo Malinen | 2025-06-10 |