Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12320012 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Marko Tuominen, Chiyu Zhu | 2025-06-03 |
| 12322593 | Selective passivation and selective deposition | Jan Willem Maes, Michael Eugene Givens, Vamsi K. Paruchuri, Ivo Raaijmakers, Shaoren Deng +4 more | 2025-06-03 |
| 12312696 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Marko Tuominen, Chiyu Zhu | 2025-05-27 |
| 12300505 | Deposition of organic films | Eva Tois, Hidemi Suemori, Viljami Pore, Varun Sharma, Jan Willem Maes +2 more | 2025-05-13 |
| 12240760 | Aligned carbon nanotubes | — | 2025-03-04 |
| 12237392 | Titanium aluminum and tantalum aluminum thin films | Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen, Timo Asikainen +2 more | 2025-02-25 |
| 12205820 | Deposition of organic films | Eva Tois, Hidemi Suemori, Viljami Pore, Varun Sharma | 2025-01-21 |