Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12320012 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2025-06-03 |
| 12312696 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Chiyu Zhu | 2025-05-27 |
| 12227835 | Selective deposition of material comprising silicon and oxygen using plasma | Viraj Madhiwala, Daniele Chiappe, Eva Tois, Charles Dezelah, Shaoren Deng +5 more | 2025-02-18 |
| 12217954 | Method of cleaning a surface | Shaoren Deng, Andrea Illiberi, Daniele Chiappe, Eva Tois, Giuseppe Alessio Verni +8 more | 2025-02-04 |