Issued Patents 2025
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12359315 | Deposition of oxides and nitrides | Henri Jussila, Qi Xie, Jiyeon Kim, Tom E. Blomberg | 2025-07-15 |
| 12354872 | Method for forming doped metal oxide films on a substrate by cyclical deposition and related semiconductor device structures | Tom E. Blomberg | 2025-07-08 |
| 12320012 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2025-06-03 |
| 12312696 | Thermal atomic layer etching processes | Tom E. Blomberg, Varun Sharma, Suvi Haukka, Marko Tuominen | 2025-05-27 |
| 12283520 | Selective deposition method to form air gaps | — | 2025-04-22 |
| 12237392 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Eric James Shero, Jerry Winkler, Petri Raisanen +2 more | 2025-02-25 |
| 12217954 | Method of cleaning a surface | Shaoren Deng, Andrea Illiberi, Daniele Chiappe, Eva Tois, Giuseppe Alessio Verni +8 more | 2025-02-04 |