Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12272546 | Formation of SiOC thin films | Toshiya Suzuki, Viljami Pore | 2025-04-08 |
| 12241156 | Combination CVD/ALD method, source and pulse profile modification | Tom E. Blomberg | 2025-03-04 |