Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12392427 | Insulated fluid lines in chemical mechanical polishing | Chad Pollard, Hari Soundararajan, Paul D. Butterfield, Haosheng Wu, Calvin Spencer Lee +1 more | 2025-08-19 |
| 12318882 | Apparatus and method for CMP temperature control | Hari Soundararajan, Haosheng Wu, Jianshe Tang | 2025-06-03 |
| 12296427 | Apparatus and method for CMP temperature control | Haosheng Wu, Chih Chung Chou, Jianshe Tang, Hui Chen, Hari Soundararajan +1 more | 2025-05-13 |
| 12290896 | Apparatus and method for CMP temperature control | Hari Soundararajan, Haosheng Wu, Jianshe Tang | 2025-05-06 |
| 12290897 | Fluid-tight electrical connection techniques for semiconductor processing | Chad Pollard, Haosheng Wu | 2025-05-06 |
| 12214468 | Temperature control of chemical mechanical polishing | Haosheng Wu, Hari Soundararajan, Yen-Chu Yang, Jianshe Tang, Shih-Haur Shen +1 more | 2025-02-04 |