Issued Patents 2025
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412748 | Plasma processing with magnetic ring X point | Barton Lane | 2025-09-09 |
| 12400865 | Pulsed capacitively coupled plasma processes | Alok Ranjan, Kensuke Taniguchi, Shinya Morikita | 2025-08-26 |
| 12394600 | Balanced RF resonant antenna system | Qiang Wang, Michael Hummel, Shyam Sridhar, Mitsunori Ohata | 2025-08-19 |
| 12394629 | Plasma processing methods using low frequency bias pulses | Alok Ranjan, Mitsunori Ohata | 2025-08-19 |
| 12387910 | Plasma processing with broadband RF waveforms | Jianping Zhao, John Carroll, Charles Schlechte | 2025-08-12 |
| 12387919 | ALD process with plasma treatment | Jianping Zhao, Toshihiko Iwao | 2025-08-12 |
| 12300468 | Method of uniformity control | Shyam Sridhar, Ya-Ming Chen, Mitsunori Ohata, Alok Ranjan | 2025-05-13 |
| 12288692 | Method of forming a FET structure by selective deposition of film on source/drain contact | Yun Han, Alok Ranjan, Andrew Metz, Hiroaki Niimi | 2025-04-29 |
| 12272520 | Process control enabled VDC sensor for plasma process | Merritt Funk, Alok Ranjan, Barton Lane, Justin Moses, Chelsea DuBose | 2025-04-08 |
| 12230475 | Systems and methods of control for plasma processing | Alok Ranjan, Mitsunori Ohata | 2025-02-18 |
| 12224160 | Topographic selective deposition | Shyam Sridhar, Alok Ranjan | 2025-02-11 |
| 12217935 | Plasma processing methods using multiphase multifrequency bias pulses | Ya-Ming Chen, Shyam Sridhar, Alok Ranjan | 2025-02-04 |