Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12296427 | Apparatus and method for CMP temperature control | Haosheng Wu, Shou-Sung Chang, Chih Chung Chou, Jianshe Tang, Hari Soundararajan +1 more | 2025-05-13 |
| 12243761 | Detection and analysis of substrate support and pre-heat ring in a process chamber via imaging | Martin Jeffrey Salinas, Zhepeng CONG, Xinning LUAN, Ashur J. ATANOS | 2025-03-04 |