Issued Patents 2025
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12416081 | Manifolds for uniform vapor deposition | David Marquardt, Andrew Michael Yednak, III, Herbert Terhorst | 2025-09-16 |
| 12406871 | Substrate susceptor using edge purging | Raj Singu, Todd Robert Dunn, Carl Louis White, Herbert Terhorst, Bhushan Zope | 2025-09-02 |
| 12406881 | Methods and systems for filling a gap | Elina Färm, Shinya Iwashita, Charles Dezelah, Jan Willem Maes, Timothee Blanquart +5 more | 2025-09-02 |
| 12362171 | Methods and systems for forming a layer comprising aluminum, titanium, and carbon | Lifu Chen, Qi Xie, Charles Dezelah, Petro Deminskyi, Giuseppe Alessio Verni +1 more | 2025-07-15 |
| 12351902 | Methods and systems for delivery of vanadium compounds | Charles Dezelah, Qi Xie, Petri Raisanen, Dieter Pierreux, Bert Jongbloed +1 more | 2025-07-08 |
| 12354877 | Vapor deposition of films comprising molybdenum | Bhushan Zope, Eric Christopher Stevens, Shankar Swaminathan, Robert Brennan Milligan | 2025-07-08 |
| 12295163 | Formation of gate stacks comprising a threshold voltage tuning layer | Fu Tang, Gejian Zhao, Eric Jen Cheng Liu | 2025-05-06 |
| 12293911 | Structure including SiOCN layer and method of forming same | YoungChol Byun, Bed Prasad Sharma, Shankar Swaminathan | 2025-05-06 |
| 12247286 | Heater assembly including cooling apparatus and method of using same | Carl Louis White, Kyle Fondurulia, Timothy J. Sullivan | 2025-03-11 |
| 12249534 | Detection method for seized traveling lift pins in wafer processing reactor systems | Abhishek Mangoli, Harihara Krishnan Krishnamoorthy, Daniel G. Maurice, Julio Cesar Diaz, Massood Mostaghimi | 2025-03-11 |
| 12237392 | Titanium aluminum and tantalum aluminum thin films | Suvi Haukka, Michael Eugene Givens, Jerry Winkler, Petri Raisanen, Timo Asikainen +2 more | 2025-02-25 |
| 12237171 | Method of forming vanadium nitride layer and structure including the vanadium nitride layer | Giuseppe Alessio Verni, Qi Xie, Henri Jussila, Charles Dezelah, Jiyeon Kim +1 more | 2025-02-25 |
| 12221357 | Methods and apparatus for stabilizing vanadium compounds | Charles Dezelah | 2025-02-11 |