Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12249534 | Detection method for seized traveling lift pins in wafer processing reactor systems | Eric James Shero, Abhishek Mangoli, Harihara Krishnan Krishnamoorthy, Daniel G. Maurice, Massood Mostaghimi | 2025-03-11 |