Issued Patents 2025
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322659 | Pixel classification of film non-uniformity based on processing of substrate images | Nojan Motamedi | 2025-06-03 |
| 12288724 | Region classification of film non-uniformity based on processing of substrate images | Nojan Motamedi | 2025-04-29 |
| 12272047 | Residue measurement from machine learning based processing of substrate images | Sivakumar Dhandapani, Arash Alahgholipouromrani, Jun Qian, Kiran Shrestha | 2025-04-08 |
| 12257665 | Machine vision as input to a CMP process control algorithm | Benjamin Cherian, Jun Qian, Nicholas A. Wiswell, Boguslaw A. Swedek, Thomas H. Osterheld | 2025-03-25 |
| 12233505 | Polishing system with capacitive shear sensor | Nicholas A. Wiswell, Chih Chung Chou | 2025-02-25 |