Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12387962 | Substrate processing apparatus, method of processing substrate, method of manufacturing semiconductor device, and recording medium | Hiroshi Ashihara | 2025-08-12 |
| 12371788 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Kazuki NONOMURA | 2025-07-29 |
| 12354887 | Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus | Gen Li, Hirohisa Yamazaki, Kenichi Suzaki | 2025-07-08 |
| 12293932 | Substrate processing apparatus, elevator and method of manufacturing semiconductor device | Makoto Hirano, Koji Shibata, Yusaku OKAJIMA | 2025-05-06 |
| 12188124 | Substrate processing apparatus, gas nozzle and method of manufacturing semiconductor device | Unryu Ogawa, Toshiki Fujino, Yukihito Hada, Naoko Tsunoda | 2025-01-07 |