Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12188124 | Substrate processing apparatus, gas nozzle and method of manufacturing semiconductor device | Yuji Takebayashi, Unryu Ogawa, Toshiki Fujino, Yukihito Hada | 2025-01-07 |