Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354868 | Cleaning method, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Yuma IKEDA, Kazuki NONOMURA | 2025-07-08 |
| 12354887 | Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus | Gen Li, Hirohisa Yamazaki, Yuji Takebayashi | 2025-07-08 |
| 12249502 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Kazuki NONOMURA, Yoshimasa NAGATOMI | 2025-03-11 |
| 12234550 | Vaporizer, processing apparatus and method of manufacturing semiconductor device | Gen Li, Hirohisa Yamazaki | 2025-02-25 |