Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12371788 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Yuji Takebayashi | 2025-07-29 |
| 12354868 | Cleaning method, method of manufacturing semiconductor device, recording medium, and substrate processing apparatus | Yuma IKEDA, Kenichi Suzaki | 2025-07-08 |
| 12249502 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Kenichi Suzaki, Yoshimasa NAGATOMI | 2025-03-11 |