Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12354887 | Cleaning method, method of manufacturing semiconductor device, and substrate processing apparatus | Gen Li, Kenichi Suzaki, Yuji Takebayashi | 2025-07-08 |
| 12234550 | Vaporizer, processing apparatus and method of manufacturing semiconductor device | Gen Li, Kenichi Suzaki | 2025-02-25 |