Issued Patents 2025
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D1086086 | Separator of substrate processing apparatus | — | 2025-07-29 |
| 12293932 | Substrate processing apparatus, elevator and method of manufacturing semiconductor device | Yuji Takebayashi, Makoto Hirano, Koji Shibata | 2025-05-06 |
| 12272579 | Substrate processing apparatus, substrate suppport and method of manufacturing semiconductor device | — | 2025-04-08 |
| 12203167 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidetoshi Mimura, Takafumi Sasaki, Hidenari Yoshida | 2025-01-21 |