Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12211689 | Method of manufacturing semiconductor device capable of controlling film thickness distribution | Keigo NISHIDA, Takashi Ozaki | 2025-01-28 |
| 12203167 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidetoshi Mimura, Hidenari Yoshida, Yusaku OKAJIMA | 2025-01-21 |