Issued Patents 2025
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12203167 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidetoshi Mimura, Takafumi Sasaki, Yusaku OKAJIMA | 2025-01-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12203167 | Substrate processing apparatus and method of manufacturing semiconductor device | Hidetoshi Mimura, Takafumi Sasaki, Yusaku OKAJIMA | 2025-01-21 |