Issued Patents 2025
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411417 | Projection objective including an optical device | Johannes Lippert, Kerstin Hild, Hans-Michael Stiepan, Thilo Pollak, Jeffrey Cavaco | 2025-09-09 |
| 12339587 | Facet assembly for a facet mirror | Joachim Hartjes, Alexander Wolf | 2025-06-24 |
| 12271117 | Support for an optical element | Joachim Hartjes | 2025-04-08 |
| 12222655 | Stop, optical system and lithography apparatus | Benjahman Julius Modeste, Daniel Golde, Ulrich Loering, Ralf Zweering, Stefan Xalter | 2025-02-11 |
| 12210289 | Mirror, in particular for a microlithographic projection exposure apparatus | Kerstin Hild, Daniel Golde, Hans-Michael Stiepan, Vitaliy Shklover | 2025-01-28 |