Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12332576 | Method for maintaining a projection exposure apparatus, service module and arrangement for semiconductor lithography | Dirk Heinrich Ehm, Jens Kugler, Marwene Nefzi | 2025-06-17 |
| 12222655 | Stop, optical system and lithography apparatus | Toralf Gruner, Daniel Golde, Ulrich Loering, Ralf Zweering, Stefan Xalter | 2025-02-11 |