Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12222655 | Stop, optical system and lithography apparatus | Benjahman Julius Modeste, Toralf Gruner, Ulrich Loering, Ralf Zweering, Stefan Xalter | 2025-02-11 |
| 12210289 | Mirror, in particular for a microlithographic projection exposure apparatus | Kerstin Hild, Toralf Gruner, Hans-Michael Stiepan, Vitaliy Shklover | 2025-01-28 |