Issued Patents 2025
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12405108 | Production method and measurement method | Hans-Michael Stiepan, Thomas Monz, Julian Kaller | 2025-09-02 |
| 12222655 | Stop, optical system and lithography apparatus | Benjahman Julius Modeste, Toralf Gruner, Daniel Golde, Ralf Zweering, Stefan Xalter | 2025-02-11 |