Issued Patents 2025
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411417 | Projection objective including an optical device | Johannes Lippert, Toralf Gruner, Kerstin Hild, Thilo Pollak, Jeffrey Cavaco | 2025-09-09 |
| 12405108 | Production method and measurement method | Thomas Monz, Julian Kaller, Ulrich Loering | 2025-09-02 |
| 12332043 | Measurement method for interferometrically determining a surface shape | Sebastian Fuchs, Jochen Hetzler | 2025-06-17 |
| 12288706 | Parameterizing x-ray scattering measurement using slice-and-image tomographic imaging of semiconductor structures | Thomas Korb, Eugen Foca, Alex Buxbaum, Dmitry Klochkov, Jens Timo Neumann | 2025-04-29 |
| 12235097 | Diffractive optical element for a test interferometer | Alexander Winkler, Martin Scheid, Jochen Hetzler, Frank Eisert | 2025-02-25 |
| 12210289 | Mirror, in particular for a microlithographic projection exposure apparatus | Kerstin Hild, Toralf Gruner, Daniel Golde, Vitaliy Shklover | 2025-01-28 |