Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12288705 | FIB-SEM 3D tomography for measuring shape deviations of HAR structures | Amir Avishai, Alex Buxbaum, Eugen Foca, Thomas Korb, Keumsil Lee | 2025-04-29 |
| 12288706 | Parameterizing x-ray scattering measurement using slice-and-image tomographic imaging of semiconductor structures | Hans-Michael Stiepan, Thomas Korb, Eugen Foca, Alex Buxbaum, Jens Timo Neumann | 2025-04-29 |
| 12283504 | Contact area size determination between 3D structures in an integrated semiconductor sample | Alex Buxbaum, Amir Avishai, Thomas Korb, Eugen Foca, Keumsil Lee | 2025-04-22 |