Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12293895 | Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methods | Eugen Foca, Thomas Korb, Daniel Fischer | 2025-05-06 |
| 12288705 | FIB-SEM 3D tomography for measuring shape deviations of HAR structures | Alex Buxbaum, Eugen Foca, Dmitry Klochkov, Thomas Korb, Keumsil Lee | 2025-04-29 |
| 12283504 | Contact area size determination between 3D structures in an integrated semiconductor sample | Alex Buxbaum, Dmitry Klochkov, Thomas Korb, Eugen Foca, Keumsil Lee | 2025-04-22 |