Issued Patents 2025
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12411417 | Projection objective including an optical device | Johannes Lippert, Toralf Gruner, Hans-Michael Stiepan, Thilo Pollak, Jeffrey Cavaco | 2025-09-09 |
| 12276917 | Mirror, in particular for microlithography | Jan Horn, Mohammad Awad | 2025-04-15 |
| 12210289 | Mirror, in particular for a microlithographic projection exposure apparatus | Toralf Gruner, Daniel Golde, Hans-Michael Stiepan, Vitaliy Shklover | 2025-01-28 |